RF/Digital Measurement Systems

The Probe station developed by AET, Inc. Is very flexible to probe samples of various shapes
and sizes precisely. It can be used for probing from a semiconductor wafer to an RF circuit.
AET also provide a TRL/LRM Calibration kit and various types of probe.

Probe Station

The Probe station developed by AET, Inc. has a probing stage and a micro positioner that can be adjusted on the X-Y-Z-theta directions, and can probe samples of various shapes and sizes. A custom designed probing fixture allows the use of air coplanar, semi-rigid, or differential active probes. A TRL/LRM calibration kit are designed and manufactured. The probe station can be used for various measurements and calibrations on a semiconductor wafer up to a RF circuit.

The micro positioner provides high precision positionings on straight motions of XYZ and rotational motions of theta 1 and 2. Each axis of XYZ has a micrometer that can be fine-adjusted. A parallel adjustment of a probe can be performed by a clamp screw roughly, and by theta 1 and 2 accurately. The alignment of these five axes enables to establish a high-level measurement environment. This micro positioner provides 8 types of positioners to fit to a coaxial, multi-pin types and other types of probes. It can be utilized under the severe measurement condition which does not allow even the slightest gap between a probe and the sample to be measured.

The vibration isolation table/desk are designed to reduce vibration of the probe station to a minimum.
They can improve the measurement accuracy and the reproductivity of the probe station.